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[For semiconductor inspection equipment] Maximum load 10kg - Z stage L-310

For Z-axis positioning in wafer inspection and chip inspection. Precision Z-stage utilizing high-rigidity cross roller guides.

In the semiconductor inspection process, precise positional control at the nano level is required to accurately detect minute defects in wafers and chips. In particular, stable positioning in the Z direction significantly affects inspection accuracy, especially in focus adjustments for inspection cameras and sensors, as well as in controlling the height position of the wafer. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. Its high guide precision and rigidity enable stable Z-direction positioning in semiconductor inspection equipment. 【Application Scenarios】 - Wafer inspection equipment - Semiconductor chip inspection equipment - Image processing inspection equipment - Focus adjustment for inspection cameras - Probe height adjustment 【Benefits of Implementation】 - Improved inspection accuracy through high-precision Z-axis position control - Enhanced reliability of inspection data due to stable operation - Long operating times supported by high duty cycle - Improved yield through enhanced defect detection accuracy